Low Dielectric Constant Materials for IC Applications: v. 9 by Paul S. Ho,Jihperng Leu,Wei William Lee

By Paul S. Ho,Jihperng Leu,Wei William Lee

Low dielectric consistent fabrics are a huge element of microelectronic units. This finished booklet covers the most recent low-dielectric-constant (low-k) fabrics expertise, skinny movie fabrics characterization, integration and reliability for back-end interconnects and packaging purposes in microelectronics. hugely informative contributions from prime educational and business laboratories supply complete information regarding fabrics applied sciences for < 0.18 um procedure expertise. themes contain: natural dielectric fabrics, Inorganic dielectric fabrics, Composite dielectric fabrics, Metrology and characterization suggestions, Integration, Reliability. This quantity should be a useful source for execs, scientists, researchers and graduate scholars excited by dielectric expertise improvement, fabrics technological know-how, polymer technological know-how, and semiconductor units and processing.

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